Charged Particle Beam Device

ABSTRACT

There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of a predetermined gray value is less than a predetermined percentage, it is decided that a mesh image is not included in the scanning transmission electron microscope image. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. In the case where the mesh image is included in the scanning transmission electron microscope image, a magnification is increased, a specimen stage is moved, or beam deflection is performed, and when the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to other gradation scale and a scanning transmission electron microscope image is obtained.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to charged particle beam devices forobtaining scanning transmission electron microscope images and, moreparticularly, relates to a charged particle beam device which uses amesh which is for holding a specimen.

2. Description of the Related Art

A scanning transmission electron microscopy uses a mesh which is forholding a specimen. Therefore, in the case of observing an objectivespecimen by automatically moving a field of view, there is a case wherea part of a grid of the mesh is entered in the field of view. When thegrid of the mesh is entered in the field of view, there is a case wherethe specimen is lost to view in a monitor because the specimen and thegrid are extremely different in shade level.

Japanese Patent Application Laid-Open No. 2006-228748 proposes a methodwhich automatically determines whether or not an automaticallyphotographed field of view is a field of view which is suitable forsearch of an objective morphology, and in the case where it is notsuitable for observation and search, movement to the next field of viewis made.

In the method disclosed in Japanese Patent Application Laid-Open No.2006-228748, work for determining whether or not the field of view issuitable or not is complicated.

SUMMARY OF THE INVENTION

An object of the present invention is to provide means which can preventa specimen from not being able to be observed due to entering of a partof a grid of a mesh in a field of view in a charged particle beam devicewhich uses a mesh which is for holding the specimen.

According to a scanning transmission charged particle beam device of thepresent invention, each pixel of a scanning transmission electronmicroscope image is displayed on the basis of a gray value of apredetermined gradation scale. In the case where the number of pixels ofa predetermined gray value is less than a predetermined percentage, itis determined that a mesh image is not included in the scanningtransmission electron microscope image, and in the case where the numberof pixels of the predetermined gray value is not less than thepredetermined percentage, it is determined that the mesh image isincluded in the scanning transmission electron microscope image.

In the case where the mesh image is not included in the scanningtransmission electron microscope image, the predetermined gradationscale is converted to other gradation scale and a scanning transmissionelectron microscope image is obtained. In the case where the mesh imageis included in the scanning transmission electron microscope image, amagnification is increased, a specimen stage is moved, or beamdeflection is performed, and when the mesh image is not anymore includedin the scanning transmission electron microscope image, thepredetermined gradation scale is converted to other gradation scale anda scanning transmission electron microscope image is obtained.

According to the present invention, it is possible to prevent a specimenfrom not being able to be observed due to entering of a part of a gridof a mesh in a field of view in a charged particle beam device whichuses a mesh which is for holding the specimen.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of an electron microscopy showing anexample of a configuration of a scanning transmission electronmicroscopy according to the present invention;

FIGS. 2A and 2B are views for explaining examples of a mesh in the casewhere a field of view is searched or in the case where a specimen imageis observed by the scanning transmission electron microscopy accordingto the present invention;

FIGS. 3A and 3B are views showing histograms of scanning transmissionelectron microscope images displayed in a monitor by the scanningtransmission electron microscopy according to the present invention;

FIG. 4 is a view for explaining a method for setting a monitoring regionin the scanning transmission electron microscopy of this example;

FIG. 5 is a flow chart for explaining a first example of a method forconverting from 1024 to 256 gradation levels in the scanningtransmission electron microscopy of example;

FIG. 6 is a flow chart for explaining a second example of a method forconverting from 1024 to 256 gradation levels in the scanningtransmission electron microscopy of this example; and

FIG. 7 is a flow chart for explaining a third example of a method forconverting from 1024 to 256 gradation levels in the scanningtransmission electron microscopy of this example.

DESCRIPTION OF REFERENCE NUMERALS

-   1 Electron microscopy body-   2 Electron gun-   3 Electron beam-   4 Irradiation lens-   5 Scanning coil-   6 Objective lens-   7 Specimen stage-   8 Magnifying lens system-   9 Imaging device-   10 Electron gun control device-   11 Irradiation lens control device-   12 Scanning coil control device-   13 Objective lens control device-   14 Magnifying lens system control device-   15 Specimen stage control device-   16 Computing machine mounted with control device and image    processing control device-   17 Control device-   18 Image processing control device-   19 Monitor-   101 Specimen

DESCRIPTION OF THE PREFERRED EMBODIMENTS

A charged particle beam device according to the present invention willbe described hereinafter in detail with reference to the drawings. Thecharged particle beam device of the present invention includes atransmission electron microscopy and a scanning transmission electronmicroscopy. In what follows, the scanning transmission electronmicroscopy will be described as an example of the present invention,however, the present invention is also applicable to the transmissionelectron microscopy.

A structure of the scanning transmission electron microscopy of thisexample will be described with reference to FIG. 1. The scanningtransmission electron microscopy of this example includes an electrongun 2, an irradiation lens 4, a scanning coil 5, an objective lens 6, aspecimen stage 7, a magnifying lens system 8, and an imaging device 9,and these are provided in an electron microscopy body 1. The imagingdevice 9 may be provided with a scintillator and a digital camera(charge coupled device (CCD) camera), for example.

The scanning transmission electron microscopy of this example furtherincludes an electron gun control device 10 which controls the electrongun 2, an irradiation lens control device 11 which controls theirradiation lens 4, a scanning coil control device 12 which controls thescanning coil 5, an objective lens control device 13 which controls theobjective lens 6, a magnifying lens control device 14 which controls themagnifying lens system 8, a specimen stage control device 15 whichcontrols the specimen stage 7, a computer 16, and a monitor 19. Thecomputer 16 includes a control device 17 and an image processing controldevice 18. The control device 17 controls the electron gun controldevice 10, the irradiation lens control device 11, the scanning coilcontrol device 12, the objective lens control device 13, the magnifyinglens control device 14, and the specimen stage control device 15.

Electron beams 3 emitted from the electron gun 2 are converged by theirradiation lens 4, and are deflected by the scanning coil 5 composed ofdeflection coils of an X direction and a Y direction. The electron beams3 deflected in two directions are focused on a specimen 101 which isheld by the specimen stage 7, by the objective lens 6, and are scannedon a specimen plane. The electron beams 3 transmitted through thespecimen 101 are enlarged by the magnifying lens system 8, and imaged bythe imaging device 9. A scanning transmission electron microscope image(STEM image) from the imaging device 9 is sent to the computer 16.

The image processing control device 18 displays the scanningtransmission electron microscope image from the imaging device 9 in themonitor 19. At this time, the image processing control device 18 reads agray value of each pixel of the scanning transmission electronmicroscope image, produces a histogram in which a horizontal axisindicates the gray value and a vertical axis indicates the number ofpixels, and displays the same in the monitor 19. Examples of thehistograms will be described later with reference to FIGS. 3A and 3B.

The mesh for use in the case where a field of view is searched or in thecase where a specimen image is observed will be described with referenceto FIGS. 2A and 2B. As shown in FIG. 2A, the mesh includes a metalnet-like grid 201 and a support membrane 202. FIG. 2A shows a statewhere a solution 102 including a specimen to be observed is on the mesh.FIG. 2B shows an enlarged image of the neighborhood of the mesh. Asshown in the drawing, in the case of observing by applying negativedyeing to the specimen 101 such as a virus, there are many that thespecimen 101 is gathered in the vicinity of the mesh due to surfacetension of a dyeing agent. Therefore, when the specimen 101 is observed,a part of the grid 201 of the mesh is entered in a field of view. Thereis a case where the specimen 101 is not displayed in a monitor becausethe specimen and the grid 201 of the mesh are extremely different inshade.

FIGS. 3A and 3B show the examples of the histograms to be displayed inthe monitor 19. The horizontal axis of the histogram shows a gradationof a gray value of the scanning transmission electron microscope image,and the vertical axis shows the number of pixels of the gray value ofthe scanning transmission electron microscope image. The gradation ofthe gray value of the scanning transmission electron microscope image inthe horizontal axis is usually displayed in not less than 10 bits. Inthe case where the gradation is displayed in 10 bits as this example,the gray value is divided into 1024 gradation levels from the minimumvalue 0 to the maximum value 1023, the left end shows the darkest value0, and the right end shows the brightest value 1023.

FIG. 3A shows an example of the histogram in the case where a part ofthe mesh is displayed in the field of view. When there is the part ofthe grid of the mesh in the field of view, the number of pixels of thegray value 0 increases in the histogram. That is, having many of thegray value 0 is a sign that represents an image of the grid of the mesh.

FIG. 3B shows a histogram after that data of the gray value 0 is removedand an image at portions whose gray values are 1 to 1023 is converted to256 gradation levels by use of the image processing control device 18.This histogram represents an image in which the image of the grid of themesh is removed.

A method for setting a monitoring region in the scanning transmissionelectron microscopy of this example will be described with reference toFIG. 4. According to this example, as shown in the drawing, an annularportion 401 shown by hatched line excluding 256×256 pixels at thecentral portion in the scanning transmission electron microscope imageof 512×512 pixels is set as the monitoring region. In this case, themonitoring region is a region where the number of pixels of the grayvalue 0 in the scanning transmission electron microscope image iscalculated. The gray value 0 represents an image of the grid of themesh. As to be described hereinafter, a percentage of the gray value 0included in the monitoring region is calculated, and from its result, itis determined whether or not the image of the grid of the mesh isincluded in the scanning transmission electron microscope image.

The monitoring region shown in this case is a mere example, for example,in the scanning transmission electron microscope image of 512×512pixels, a portion excluding 384×384 pixels at the central portion may beset as the monitoring region.

Methods for removing a mesh portion from the scanning transmissionelectron microscope image and converting the image from 1024 to 256gradation levels in the image processing control device 18 will bedescribed with reference to FIGS. 5 to 7.

A first example of the method for removing the mesh portion from thescanning transmission electron microscope image and converting the imagefrom 1024 to 256 gradation levels in the image processing control device18 of the scanning transmission electron microscopy of this example willbe described with reference to FIG. 5.

In step S101, an operator prepares the specimen 101 to be an observingobject, operates the scanning transmission electron microscopy, and setsa search range which is for automatically moving a field of view.

In step S102, movement to the field of view set up is automatically madeby the specimen stage 7, a transmissive electron is detected by theimaging device 9, and the scanning transmission electron microscopeimage is obtained by the image processing control device 18.

In step S103, the image processing control device 18 calculates how manypercent of the number of pixels of the gray value 0 is occupied in themonitoring region of the scanning transmission electron microscopeimage.

In step S104, it is determined whether or not the number of pixels ofthe gray value 0 is not less than 5% in the monitoring region. In thecase that the number of pixels of the gray value 0 is not less than 5%,it is judged that an image of the grid of the mesh is included in themonitoring region, and the process proceeds to step S105. In the casethat the number of pixels of the gray value 0 is less than 5%, it isjudged that the image of the grid of the mesh is not included in themonitoring region, and the process proceeds to step S106.

In step S105, a portion of the image whose gray values are 1 to 1023 isconverted to 256 gradation levels. That is, the portion is converted tothe image of 256 gradation levels after a portion of the gray value 0being removed. In step S106, the image is directly converted from 1024to 256 gradation levels. That is, the portion of all the gray values 0to 1023 is converted to 256 gradation levels. In step S107, the imageconverted to 256 gradation levels and its histogram are displayed in themonitor 19.

A second example of the method for removing the mesh portion from thescanning transmission electron microscope image and converting the imagefrom 1024 to 256 gradation levels in the image processing control device18 of the scanning transmission electron microscopy of this example willbe described with reference to FIG. 6.

Steps S201 to S204 are the same as steps S101 to S104 shown in FIG. 5.In this case, a portion different from the example of FIG. 5 will bedescribed.

In step S204, it is determined whether or not the number of pixels ofthe gray value 0 is not less than 5% in the monitoring region. In thecase that the number of pixels of the gray value 0 is not less than 5%,it is judged that an image of the grid of the mesh is included in themonitoring region, and the process proceeds to step S205. In the casethat the number of pixels of the gray value 0 is less than 5%, it isjudged that the image of the grid of the mesh is not included in themonitoring region, and the process proceeds to step S206.

In step S205, the scanning coil control device 12 is controlled by thecontrol device 17, and a magnification is increased by one level, thus,a smaller region on the specimen is displayed. Accordingly, the image ofthe grid of the mesh can be removed from a field of view. Suchmagnification change is repeated till the number of pixels of the grayvalue 0 becomes less than 5% in the monitoring region. In the monitoringregion, when the number of pixels of the gray value 0 becomes less than5%, the process proceeds to step S206.

Steps S206 and step S207 are the same as steps S106 and S107 of theexample shown in FIG. 5. That is, the image is converted from 1024 to256 gradation levels in step S206. In step S207, the image converted to256 gradation levels and its histogram are displayed in the monitor 19.

A third example of the method for removing the mesh portion from thescanning transmission electron microscope image and converting the imagefrom 1024 to 256 gradation levels in the image processing control device18 of the scanning transmission electron microscopy of this example willbe described with reference to FIG. 7.

Steps S301 to step S304, step S306, and step S307 are the same as stepsS201 to S204, step S206, and step S207 of the example shown in FIG. 6.In this example, the process of step S305 is different from that of stepS205 of the example shown in FIG. 6. In this case, step S305 will bedescribed.

In step S305, the specimen stage control device 15 is controlled by thecontrol device 17, and the specimen stage 7 is moved to an X directionand a Y direction. Thus, by moving the specimen stage 7, a field of viewis changed and the image of the grid of the mesh can be removed from thefield of view. In addition, in order to change the field of view, beamsmay be moved to the X direction and the Y direction by controlling thescanning coil control device 12 in place of moving the specimen stage 7.

Such movement of the field of view is repeated till the number of pixelsof the gray value 0 becomes less than 5% in the monitoring region.

In the case where the number of pixels of the gray value 0 in themonitoring region tends to be increased by the movement of the field ofview, a moving direction and an amount of movement are set so that themoving direction and the amount of movement of the specimen stage reduceas compared with previous values. When the number of pixels of the grayvalue 0 becomes less than 5% in the monitoring region, the processproceeds to step S306.

The monitoring region is used in the examples shown in FIGS. 5 to 7.That is, in steps S104, S204, and S304, it is determined whether or notthe number of pixels of the gray value 0 is not less than 5% in themonitoring region. However, the present invention does not have to usethe monitoring region. That is, in steps S104, S204, and S304, it may bedetermined whether or not the number of pixels of the gray value 0 isnot less than 5% in the scanning transmission electron microscope imageobtained by the imaging device in place of the monitoring region.

Further, a percentage of the number of pixels of the gray value 0 isdetermined in steps S104, S204, and S304 in the examples shown in FIGS.5 to 7. However, a percentage in which the gray values are predeterminednumbers, for example, a percentage of the number of pixels of the grayvalues 0 and 1 may be calculated. Further, as a reference fordetermination it is not less than 5%, however, this is a mere example,it may be not less than 6%, or it may be not less than 7%.

As described above, examples of the present invention have beendescribed, however, the present invention is not limited to the abovedescribed examples, but, it is to be easily understood to those skilledin the art that the present invention can be applicable to variouschanges in the scope of the present invention as set forth in theappended claims.

1. A scanning transmission charged particle beam device, comprising: ascanning coil which deflects a charged particle beam; an objective lenswhich focuses the charged particle beam on a specimen; a specimen stagewhich holds the specimen by using a mesh; an imaging device whichdetects the charged particle beam transmitted through the specimen; animage processing control device which processes a scanning transmissionelectron microscope image from the imaging device; and a monitor whichdisplays the scanning transmission electron microscope image wherein theimage processing control device displays each pixel of the scanningtransmission electron microscope image on the basis of a gray value of apredetermined gradation scale; and converts the predetermined gradationscale to other gradation scale and obtains a scanning transmissionelectron microscope image in the case where the number of pixels of apredetermined gray value is less than a predetermined percentage.
 2. Thescanning transmission charged particle beam device according to claim 1,wherein, in the case where the number of pixels of the predeterminedgray value is less than the predetermined percentage in a monitoringregion formed of an annular region excluding a central region of thescanning transmission electron microscope image obtained by the imagingdevice, the image processing control device converts the predeterminedgradation scale to other gradation scale and obtains a scanningtransmission electron microscope image.
 3. The scanning transmissioncharged particle beam device according to claim 1, wherein, in the casewhere the number of pixels of the predetermined gray value is not lessthan the predetermined percentage, the image processing control deviceremoves pixel data of the predetermined gray value, converts thepredetermined gradation scale to other gradation scale, and obtains ascanning transmission electron microscope image.
 4. The scanningtransmission charged particle beam device according to claim 1, wherein,in the case where the number of pixels of the predetermined gray valueis not less than the predetermined percentage, the image processingcontrol device increases a magnification, whereby, when the number ofpixels of the predetermined gray value becomes less than thepredetermined percentage, the image processing control device convertsthe predetermined gradation scale to other gradation scale and obtains ascanning transmission electron microscope image.
 5. The scanningtransmission charged particle beam device according to claim 1, wherein,in the case where the number of pixels of the predetermined gray valueis not less than the predetermined percentage, the image processingcontrol device moves the specimen stage, whereby, when the number ofpixels of the predetermined gray value becomes less than thepredetermined percentage, the image processing control device convertsthe predetermined gradation scale to other gradation scale and obtains ascanning transmission electron microscope image.
 6. The scanningtransmission charged particle beam device according to claim 1, wherein,in the case where the number of pixels of the predetermined gray valueis not less than the predetermined percentage, the image processingcontrol device performs beam deflection, whereby, when the number ofpixels of the predetermined gray value becomes less than thepredetermined percentage, the image processing control device convertsthe predetermined gradation scale to other gradation scale and obtains ascanning transmission electron microscope image.
 7. A scanningtransmission electron microscopy, comprising: a scanning coil whichdeflects an electron beam from an electron gun; an objective lens whichconverges the electron beam on a specimen; a specimen stage which holdsthe specimen by a mesh; an imaging device which obtains a scanningtransmission electron microscope image from the electron beamtransmitted through the specimen; an image processing control devicewhich processes image data of the scanning transmission electronmicroscope image; and a monitor which displays the scanning transmissionelectron microscope image wherein the image processing control devicedisplays each pixel of the scanning transmission electron microscopeimage on the basis of a gray value of a predetermined gradation scale;determines whether or not the mesh image is included in a monitoringregion formed of an annular region excluding a central region of thescanning transmission electron microscope image obtained by the imagingdevice, and converts the predetermined gradation scale to othergradation scale and obtains a scanning transmission electron microscopeimage in the case where the mesh image is not included.
 8. The scanningtransmission electron microscopy according to claim 7, wherein, in thecase where the number of pixels of a predetermined gray value is lessthan a predetermined percentage in the monitoring region, the imageprocessing control device determines that the mesh image is notincluded, converts the predetermined gradation scale to other gradationscale, and obtains a scanning transmission electron microscope image. 9.The scanning transmission electron microscopy according to claim 7,wherein, when it is determined that the mesh image is included in afield of view of the scanning transmission electron microscope image,the image processing control device increases a magnification, moves thespecimen stage, or performs beam deflection, whereby, when the meshimage is not anymore included in the scanning transmission electronmicroscope image, the image processing control device converts thepredetermined gradation scale to other gradation scale and obtains ascanning transmission electron microscope image.
 10. A method forobtaining a scanning transmission electron microscope image, the methodcomprising: a step of attaching a mesh which holds a specimen to aspecimen stage; a step of deflecting an electron beam from an electrongun by controlling a scanning coil; a step of converging the electronbeam on the specimen by controlling an objective lens; a step ofobtaining a scanning transmission electron microscope image by animaging device; a step of displaying each pixel of the scanningtransmission electron microscope image on the basis of a gray value of apredetermined gradation scale; a step of setting a monitoring regionformed of an annular region excluding a central region of the scanningtransmission electron microscope image; a step of determining whether ornot the mesh image is included in the monitoring region on the basis ofdata of the gray value; a step of converting the predetermined gradationscale to other gradation scale and obtaining the scanning transmissionelectron microscope image in the case where the mesh image is notincluded in the monitoring region; and a step of displaying the scanningtransmission electron microscope image in a monitor.
 11. The method forobtaining the scanning transmission electron microscope image accordingto claim 10, wherein the determining step determines that the mesh imageis included in the monitoring region in the case where the number ofpixels of a predetermined gray value is not less than a predeterminedpercentage; and determines that the mesh image is not included in themonitoring region in the case where the number of pixels of thepredetermined gray value is less than the predetermined percentage. 12.The method for obtaining the scanning transmission electron microscopeimage according to claim 10, wherein, in the case where the mesh imageis included in the monitoring region, a magnification is increased,whereby, when the mesh image is not anymore included in the scanningtransmission electron microscope image, the predetermined gradationscale is converted to other gradation scale and a scanning transmissionelectron microscope image is obtained.
 13. The method for obtaining thescanning transmission electron microscope image according to claim 10,wherein, in the case where the mesh image is included in the monitoringregion, the specimen stage is moved, whereby, when the mesh image is notanymore included in the scanning transmission electron microscope image,the predetermined gradation scale is converted to other gradation scaleand a scanning transmission electron microscope image is obtained. 14.The method for obtaining the scanning transmission electron microscopeimage according to claim 10, wherein, in the case where the mesh imageis included in the monitoring region, beam deflection is performed,whereby, when the mesh image is not anymore included in the scanningtransmission electron microscope image, the predetermined gradationscale is converted to other gradation scale and a scanning transmissionelectron microscope image is obtained.